[Magic-dev] Help
Jeff Sondeen
sondeen at ISI.EDU
Tue Sep 14 20:51:20 EDT 2004
well, you are right, the
ftp://ftp.isi.edu/pub/sondeen/magic/new/beta/2002a/SCN6M_SUBM.10.light.tech27
techfile, as well as all related techfiles, are missing extraction
factors for m5->mi.
here is the techfile 'extract' section showing factors for M6->M5 but
nothing for metali.:
#M6->M5
overlap (m6,pad)/metal6 (m5,m5c,m345c,m456c,m6c)/metal5 0.350
sideoverlap (m6,m6c,m456c,mic,pad)/metal6 ~(m6,m6c,m456c,mic,pad)/metal6 (m5,m5c,m345c,m456c,m6c)/metal5 5.700 ~space/mi
sideoverlap (m5,m5c,m345c,m456c,m6c)/metal5 ~(m5,m5c,m345c,m456c,m6c)/metal5 (m6,m6c,m456c,mic,pad)/metal6 5.700 ~space/mi
#metal7
#metali
#Mi->M5
#Mi->M6
#fets
notice that there's NO value for MIM caps published by Mosis, for example in:
http://www.mosis.org/cgi-bin/cgiwrap/umosis/swp/params/tsmc-018/t44e_mm_non_epi-params.txt
but let's say you believe the factor for Mi->M5 is 1 FF/UM**2 (i don't
really know), then you would first convert from units of FF/UM**2 into
AF/lambda**2,
so Mi->5 would be .01 FF/lambda**2 = 10 AF/lambda**2
(works since 1FF*1um*1um = 1FF, and .01FF*10lambda*10lambda= 1FF)
(with lambda = .10 um)
so you could add this to the techfile:
#Mi->M5
overlap (mi,mic)/metali (m5,m5c,m345c)/metal5 10
the enclosed example (notice, not DRC legal since #contacts is way too
small)
which defined a 40x40 lambda Mi box, gives 16.1 fF as follows:
% m mim.mag
magic
tech scmos
timestamp 1095214777
<< m5contact >>
rect -12 -8 -7 -3
<< metal5 >>
rect -8 -3 40 40
rect -7 -8 40 -3
<< metal6 >>
rect -20 10 10 11
rect -20 0 0 10
<< micontact >>
rect 0 0 10 10
<< metali >>
rect -4 10 36 36
rect -4 0 0 10
rect 10 0 36 10
rect -4 -4 36 0
<< labels >>
rlabel metal6 -16 5 -16 5 3 m6
rlabel metal5 -6 -7 -6 -7 1 m5
rlabel metali -3 -3 -3 -3 1 mi
<< end >>
% m mim.ext
timestamp 1095214777
version 7.2
tech scmos
style TSMC0.18um(tsmc18)from:t24i
scale 1000 1 10.000000
resistclasses 6900 7800 946000 1 8000 8000 80 80 80 80 80 40
node "mi" 0 314.76 -20 0 m6 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 330 82
equiv "mi" "m6"
node "m5" 0 652.38 -12 -8 v4 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 25 20 2324 200 0 0
cap "m5" "mi" 16142.6
% m mim.spice
* SPICE3 file created from mim.ext - technology: scmos
C0 m5 mi 16.1fF
C1 mi GND 0.3fF **FLOATING
C2 m5 GND 0.7fF **FLOATING
however, i believe the TSMC design manuals specify that the MIM cap
should be modeled with a rather large spice subckt that captures all
the parasitics (that magic can't extract).
/jeff
Roohollah Aminroaya writes:
> Hi
> who can help me please ?
>
> I want to layout a MIM capacitor in magic tool, in 0.18um TSMC thech. files.
> I tried it using M5 as bottum plate, Mi as top plate, and contact mi to m6. But the magic tool didn`t extract any capacitance.
> I will be very thankfull if you help me about how I can do it. (design rules)
>
> Thank you
> Amin
>
>
>
> ---------------------------------
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> <DIV>Hi</DIV>
> <DIV>who can help me please ?</DIV>
> <DIV> </DIV>
> <DIV>
> <DIV>I want to layout a MIM capacitor in magic tool, in 0.18um TSMC thech. files.</DIV>
> <DIV>I tried it using M5 as bottum plate, Mi as top plate, and contact mi to m6. But the magic tool didn`t extract any capacitance.</DIV>
> <DIV>I will be very thankfull if you help me about how I can do it. (design rules)</DIV>
> <DIV> </DIV>
> <DIV>Thank you</DIV>
> <DIV>Amin</DIV></DIV><p>
> <hr size=1>Do you Yahoo!?<br><a
> href="http://vote.yahoo.com">vote.yahoo.com</a> - Register online to vote today!
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