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From: Jeff W. Sondeen (sondeen AT rcf-fs DOT usc.edu) Date: Tue Aug 08 2000 - 12:50:31 EDT
we noticed the following problem with magic 6.5 -- can anybody verify it as present or absent on their magic version ? the problem is that when 2 parallel metal wires have a long stretch of common (sidewall) capacitance, but a very small stretch of slightly closer spacing in common, then the entire sidewall capacitance extracted represents only that of the smaller stretch. here are the .mag and .ext files for 2 cases, the first with no small stretch, and the 2nd with a small stretch. i used techfile 2000d/SCN3M_SUBM.30, but i don't think the techfile version matters. thanks, /jeff m2s.mag: <<<< with single large common sidewall area >>>> magic tech scmos timestamp 965753121 << pwell >> rect -93 -115 9430 157 << metal2 >> rect 0 10 9384 13 rect 0 0 9384 3 << labels >> rlabel pwell -92 -114 -92 -114 2 pw rlabel metal2 1 1 1 1 1 m2a rlabel metal2 1 11 1 11 1 m2b << end >> m2s.ext: timestamp 965753121 version 5.1 tech scmos style HP0.5um(hpcmos14tb)from:T02Y scale 1000 1 30 resistclasses 3000 2400 728000 728000 1 2500 2500 70 70 50 node "m2a" 219 1.40261e-11 0 0 m2 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 28152 18774 0 0 node "m2b" 219 1.40261e-11 0 10 m2 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 28152 18774 0 0 node "pw" 0 0 -93 -115 pw 0 0 0 0 0 0 0 0 2590256 19590 0 0 0 0 0 0 0 0 0 0 cap "pw" "m2a" 81766.6 cap "pw" "m2b" 81766.6 cap "m2b" "m2a" 68302.1 <<<<<<<<<<<<<<<<<<<<<< big sidewall capacitance m2s2.mag: <<<< with small stetch of common sidewall area >>>> magic tech scmos timestamp 965753225 << pwell >> rect -93 -115 9430 157 << metal2 >> rect 0 10 9384 13 rect 3 9 6 10 rect 0 0 9384 3 << labels >> rlabel pwell -92 -114 -92 -114 2 pw rlabel metal2 1 1 1 1 1 m2a rlabel metal2 1 11 1 11 1 m2b << end >> m2s2.ext: timestamp 965753225 version 5.1 tech scmos style HP0.5um(hpcmos14tb)from:T02Y scale 1000 1 30 resistclasses 3000 2400 728000 728000 1 2500 2500 70 70 50 node "m2a" 219 1.40261e-11 0 0 m2 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 28152 18774 0 0 node "m2b" 219 1.35882e-11 0 10 m2 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 28155 18776 0 0 node "pw" 0 0 -93 -115 pw 0 0 0 0 0 0 0 0 2590256 19590 0 0 0 0 0 0 0 0 0 0 cap "pw" "m2a" 81766.6 cap "pw" "m2b" 81775.3 cap "m2b" "m2a" 25.475 <<<<<<<<<<<<<<<<<<<<<< small sidewall capacitance
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