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From: Jeff W. Sondeen (sondeen AT rcf-fs DOT usc.edu) Date: Wed Aug 22 2001 - 18:22:47 EDT
sorry for the late response. even if there were a relevant techfile, it would guarantee nothing, as magic can only do limited DRC checks (widths and spacings mostly). i put a subset of the NIST MEMS rules in ftp.isi.edu/pub/sondeen/magic/new/beta/*MEMS*.tech27 but not even their own layout examples followed all their rules (i guess there are lots of exceptions) and many rules could not be specified in magic. (for the NIST MEMS document, search the www.mosis.org) /jeff Geranamo writes: > Magic experts, > I am looking for Magic technology file for the MUMPS process for MEMS. Is it freely available from any development lab or a commercial MUMPS fab center? > > Does using the relevant tech. file guarantee that all the process rules are being followed? i.e. it is manufactarable? > > Thanks in advance, Magicians :) > > > _____________________________________________________ > Chat with your friends as soon as they come online. Get Rediff Bol at > http://bol.rediff.com > > >
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