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From: Atif (atif AT kics DOT edu.pk)
Date: Mon Sep 15 2003 - 08:43:57 EDT

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    Dear all,
I'm confused with why the design rules for the SCMOS technology are so. Please answer my following questions to clear these designs.

Why the
i) poly-poly spacing is 2 lambda
ii) 1 lambda of diffusion and metal surrounding cut
iii) 2 lambda overhang of poly at transistor gate
iv) why ndiff to pdiff spacing is so large (10 lambda)
v) why metal-metal spacing larger than poly-poly spacing
vi) why metal2-metal2 spacing larger than metal1-metal1 spaning

These questions are very common for any student of VLSi. I've consulted so many books and web links but unable to find the answer to the above questions.  Please guide me.
Regards
Atif 
Research Associate

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